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Explain LPCVD process with neat diagram. Also enlist its advantages.
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written 5.6 years ago by | • modified 5.6 years ago |
The following figure shows low-pressure CVD configuration.
The reactor consists of a long, horizontal fused quartz reactor tube which accommodates large number of closely packed silicon wafers.
End caps with vacuum seals are mounted on each end of the reactor tube.
Heating is accomplished using resistive heating elements wrapped around …