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Compare CVD and PVD processes.
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written 5.6 years ago by |
CVD | PVD |
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During CVD process chemical reaction takes place between the reactive gases & substrate surface. | During PVD process desired film material is released from the source & deposited on to the substrate. |
It is used to deposit $SiO_2$, Silicon nitride and Silicon. | It is used to deposit metal alloy … |