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Explain electron beam lithography, ion beam technique and X-ray lithography. OR Classify lithography techniques.
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teamques10
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1. Electron beam lithography
Electron beam lithography (e-beam lithography) is a direct writing technique that uses an accelerated beam of electrons to pattern features down to sub-10 nm on substrates that have been coated with an electron beam sensitive resist.
Exposure to the electron beam changes the solubility of the …
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