What is trench isolation? Explain its use in VLSI technology.

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Trench Isolation

1. Shallow trench isolation –

Shallow trench isolation (STI), also known as box isolation technique, is an integrated circuit feature which prevents electric current leakage between adjacent semiconductor device components.

STI is generally used on CMOS process technology nodes of 250 nanometers and smaller. Older

CMOS technologies and …

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