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Explain fabrication process steps along with vertical cross sectional views for CMOS inverter using n-well process.
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written 5.6 years ago by |
Step 1: Substrate identification and oxidation
For N Well process the starting point is the p type silicon wafer. i.e start with the blank wafer. Wafer is oxidized in high temperature and oxide layer is formed. The oxidation process is done by using high-purity oxygen and hydrogen, which are exposed …