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MEMS Technology Question Paper - May 18 - Electronics Engineering (Semester 8) - Mumbai University (MU)
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MEMS Technology - May 18

Electronics Engineering (Semester 8)

Total marks: 80
Total time: 3 Hours
INSTRUCTIONS
(1) Question 1 is compulsory.
(2) Attempt any three from the remaining questions.
(3) Draw neat diagrams wherever necessary.

1.a. List three silicon compound materials used in MEMS and explain their roles in …

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