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Explain in detail fabrication steps for MEMS microheater.
written 5.2 years ago by
teamques10
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modified 2.0 years ago
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RakeshBhuse
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written 2.1 years ago by
sagarkolekar
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Fabrication of micro heater on silicon oxide membrane. two inch double sided polished [100] P-type wafer is used to fabricate this micro heater.
Microheater fabrication consists following steps.
- Wafer cleaning
Switch the exhaust of chemical hood. wear protective gown, google, mouth mask, head cap just before starting work on wet …
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