What is MEMS? What is significant difference between Microelectronics and Microsystem.

• MEMS is any system that performs electrical and mechanical functions with components in micrometers is a MEMS.

• Micro - Electromechanical systems (MEMS) is the integration of mechanical elements, sensors, actuaters and electronics on a common substrate through the utilization of microfabrication technology.

• Microelectronic circuits are inherently solid and compact structures …