Discuss the role of SU8 in MEMS applications.

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written 19 months ago by

SU-8 is a type of epoxy polymer is a new UV-Curable moaterial for constructing micro mechanical components such as these in MEMS with high aspect ratio.
This polymer is biocompatible for both in-vtra and in vivo application. It possesses good mechanical properties such as hardness and young's modulus.
SU-8 has …

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