Explain silicon crystal structure. Why silicon is used as substrate material in MEMS ?

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written 19 months ago by

• modified 19 months ago

Explain silicon crystal structure. Why silicon is used as substrate material in MEMS ?

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written 19 months ago by

Silicon has an uneven lattice geometry for its atoms, but it has basically a face centered cubic [FCC] unit cell.

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A unit cell consists of atoms situated at fixed Locations defined by imaginary lines called a lattice. The dimension b of the lattice is called the lattice constant in the …

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