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What are the design considerations in selection of MEMS materials ?
written 19 months ago by | • modified 19 months ago |
What are the design considerations in selection of MEMS materials ?
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written 19 months ago by | • modified 19 months ago |
What are the design considerations in selection of MEMS materials ?
written 19 months ago by |
In recent years, enormous progress has been made in the design, fabrication and commercialization of microsystems.
Associated with these advances is an expansion of the set of materials available to MEMS designers.
In addition to the materials traditionally used in silicon micro-electronics, it is now possible to introduce and integrate …