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What are the design considerations in selection of MEMS materials ?

What are the design considerations in selection of MEMS materials ?

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  • In recent years, enormous progress has been made in the design, fabrication and commercialization of microsystems.

  • Associated with these advances is an expansion of the set of materials available to MEMS designers.

  • In addition to the materials traditionally used in silicon micro-electronics, it is now possible to introduce and integrate …

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