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What is MEMS micromachining ? Explain in details fabrication process flow of LIGA. Why electroplating is necessary in LIGA process.
written 18 months ago by gravatar for Krishna_Agrawal Krishna_Agrawal • 2.7k •   modified 18 months ago

What is MEMS micromachining ? Explain in details fabrication process flow of LIGA. Why electroplating is necessary in LIGA process.
mems technology
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written 18 months ago by gravatar for Krishna_Agrawal Krishna_Agrawal • 2.7k


  • MEMS micromachining refers to fashioning microscopic mechanical parts out of a silicon substrate or on a silicon substrate. The overall process of obtaining the small structure is called micromachining.

  • The term LIGA is an acrorym derived from the German words lithography (lithographie) electroforming (galvan forming) and molding (abforming). This technique …

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