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Compare Deposition techniques used in MEMS with respect to their applications.

Compare Deposition techniques used in MEMS with respect to their applications.

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  • Deposition techniques used in MEMS are chemical vapour deposition and physical vapour deposition.

  • In Chemical vapour Deposition (CVD), a pressure is introduced into a reaction chamber and is controlled by balanced flow regulators and control valves. Pressure molecules pass by the substrate are drawn into the boundary layer and are …

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