Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 3M

By Using Resonant Vibration:

• Shift of resonant frequency by change of stresses in lower plate electrode due to applied pressure give the change in frequency.
• The common type of micro pressure sensor are designed using piezo resistor is small in size gives better temperature sensitivity and there is linear relation between input and output.

$C = ε_r- ε_0- \frac{A}{d}$

$ε_r = \text{relative permittivity = 1.0 with air}$ $ε_0 = \text{permittivity of vacuum}$

• Drawbacks:-

  • The major problem is in protecting the diaphragm from contacting pressurized media and other problem is system packaging .