Trans conductance Mechanism in Pressure Sensors

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 3M

1 Answer

By Using Resonant Vibration:

  • Shift of resonant frequency by change of stresses in lower plate electrode due to applied pressure give the change in frequency.
  • The common type of micro pressure sensor are designed using piezo resistor is small in size gives better temperature sensitivity and there is linear relation between input and output.

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$C = ε_r- ε_0- \frac{A}{d}$

$ε_r = \text{relative permittivity = 1.0 with air}$ $ε_0 = \text{permittivity of vacuum}$

  • Drawbacks:-

    • The major problem is in protecting the diaphragm from contacting pressurized media and other problem is system packaging .
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