Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

There 3 principal silicon compounds in MEMS & microsystem: Silicon dioxide (SiO2), Silicon Carbide (SiC) & Silicon nitride ($Si_3N_4$) – each has distinct characteristic & unique applications.

Silicon dioxide ($SiO_2$)

• It is least expensive material to offer good thermal & electrical insulation.
• Also used a low – cost material for …