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Explain the Etching
written 9.4 years ago by gravatar for hetalgosavi hetalgosavi • 1.7k modified 6.4 years ago by gravatar for shubhamshukla shubhamshukla • 40
mems technology
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written 9.4 years ago by gravatar for hetalgosavi hetalgosavi • 1.7k

Reactive Ion Etching (RIE):-

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  • RIE is performed by replacing a neutral gas in rf sputtering system by one or more chemical specier.
  • Plasma interaction with these chemical results in production of both neutral and ionized energetic specier which an etch the substrate.
  • A common RIE sys is shown in fig …

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