Compare wet etching and Dry etching

153views

written 9.4 years ago by

hetalgosavi • 1.7k

modified 6.7 years ago by

ankitpandey • 100

Parameters	Dry Etching	Wet etching
Directionality	Good for most materials	Only with crystal materials [Aspect ratio upto 100]
Production automation	Good	Poor
Environmental impact	Low	High
Masking film adherence	Not as critical	Very critical
Selectivity	Poor	Very Good
Materials to be etched	Only certain materials	All
Process scale-up	Difficult	Easy …

Create a free account to keep reading this post.

and 3 others joined a min ago.

ADD COMMENT EDIT