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Bulk Micro manufacturing

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 2M

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  • Bulk micromanufacturing technique involves creating 3-D components by removing materials from thick substrates (silicon or other materials) using primarily etching method.
  • Etching – dry or wet etching is the principal technique used in bulk micromanufacturing.
  • Substratesthat can be etched in bulk micromanufacturing include:-

    1) Silicon 2) SiC 3) GaAs 4) Special polymers

  • Wet etching involves the use of chemical solvents (called etchants
  • Dry etching uses plasma to remove materials at the desired locations on a substrate.

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