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Isotropic and Anisotropic Etching
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  • Pure silicon crystals are not isotropic in their properties due to non-uniform distribution of atoms at their interior.
  • Such anisotropic properties are represented by three distinct planes:

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  • The (111) plane makes an angle of 54.740 with the (100)plane.
  • Corresponding to these (3) planes are 3 distinct directions in which etching takes place: <100>, <110> and <111>.
  • The <100> is the easiest direction for etching and the <111> is the hardest direction for etching.
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