Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

• The term LIGA is an acronym for German term in

  “Lithography (Lithographie),

  Electroforming (Galvanoformung), and

  Molding (Abformung)”.

• The technique was first developed at the Karisruhe Nuclear Research Center in Karisruhe, Germany.
• LIGA process is radically different from silicon based micro manufacturing.
• The major difference is that LIGA can produce microstructures that have high aspect ratio.
• There is no restriction on using silicon or silicon compounds as substrate. Nickel is a common material for LIGA products.
• It is easier to be produced in large volumes.
• Major disadvantages of LIGA process is the requirement of special facility synchrotron radiation (X-ray) source, a very expensive facility.

Major steps in LIGA process

Fabrication of a square tube using LIGA