Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

• Substrates in LIGA process must be electrical conductive to facilitate subsequent electroplating over photoresists mold.
• Metals such as : steel copper plates, titanium and nickel, or
• Silicon with thin titanium or silver / chrome top layer, glass with thin metal layers.

Photoresists materials

Basic requirements:

• Must be sensitive to x-ray …