Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 3M

Failure Mode	Causes	Probability
Mechanical	Local stress concentration due to surface roughness.	Low
	Improper assembly tolerances	Moderate
	Vibration – induced high cycles fatigue failure	Low in silicon, moderate in plastic
	Delamination of thin layers	Moderate to high
	Thermal stresses by mismatch of CTE	High
Electromechanical break-down	Collapse of electrodes due …