Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 2M

Some oxides can be formed from the sintering of a deposited gel layer that contains a suitable precursor. Eg. Partially polymerized gel of organosiloxane compounds that can be dissolved in a solvent and spin-cost onto the wafer.

Subsequent booking of crossline the siloxane with the removal of the volatile organic moiety and further densifies the siloxane into silicon dioxide. e.g SOG

It is possible to deposit various piezoelectric materials, such as lead zirconatetitanate (PZT.