Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

A) Mechanical Actuators

Electrostatic actuation: The fundamental actuation principle behind electrostatic actuators is the attraction of two oppositely charged plates. Their use is extensive in MEMS devices, since it is relatively simple to fabricate closely spaced gaps with conductive plates on opposite sides. For a parallel plate capacitor, the energy …