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Explain fabrication of any one of the MEMS devices using bulk micromachining technique
written 7.7 years ago by gravatar for gawanderagini gawanderagini • 50 modified 4.0 years ago by gravatar for Sharad Sharad • 160
mems technology
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written 4.0 years ago by gravatar for Sharad Sharad • 160
  • Micromachining is defined as the process of shaping Si or other material to realize 3 dimensional mechanical structure in miniature form.
  • The oldest micromachining technology is bulk micromachining.
  • This technique involves the selective removal of the substrate material in order to realize miniaturized mechanical components.
  • Bulk micromachining can be accomplished …

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