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Explain various changes in gate oxide after fabrication of MOSFET.
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written 7.2 years ago by
teamques10
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There are four basic types of charges/ defects that are associated with gate oxide.
Fixed charges:
It is a charge in Si-SiO2 structure, located in the oxide in the immediate vicinity of Si surface. It does not move and exchange charge with Si (hence, "fixed"). It associated with incompletely oxidized …
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