0
837views
What are Planar dopant sources?
1 Answer
| written 7.1 years ago by |
These can be directly placed on semiconductors slice by CVD technique.
They have disadvantage of requiring extra processing step but also avoids necessity for uniform transport of dopant in vapor form to the slice.
In arrangement shown below, each dopant slice act as source for two adjacent microcircuit slices.
Typically …