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Define range, projected range & straggle with respect to ion implantation. Also explain the damage produced due to light ion & heavy ion with neat diagram.
written 7.1 years ago by gravatar for teamques10 teamques10 ★ 70k •   modified 5.5 years ago
ic technology
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written 7.1 years ago by gravatar for teamques10 teamques10 ★ 70k

Range:

The average penetration depth is called the range of the ions. Under typical circumstances ion ranges will be between 10 nanometers and 1 micrometer. Therefore, Range of an ion is the actual distance travelled by it before stopping.

Projected range:

Each implanted ion traverses a random path as it …

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