Write a short note on pattern transfer.

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written 7.1 years ago by

teamques10 ★ 70k

Pattern transfer process consists of taking a suitable patterned mask and imagining it on surface of wafer which is precoated with resist.

Four types of exposure techniques are used:

Contact printing –

Contact exposure is the oldest used method. The photomask is in direct contact to the resist layer, the …

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