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Explain SOI fabrication using Bonded SOI and Smart cut method.
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Bonded SOI wafers –

It creates the buried oxide without ion implantation.

First two silicon wafers undergo thermal oxidation process to form $SiO_2$ layer.

The two hydrophilic surfaces (such as $SiO_2$) are brought into intimate contact of each other to form the buried oxide.

The backside of one of the …

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