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Explain SOI fabrication using Bonded SOI and Smart cut method.
1 Answer
| written 7.1 years ago by |
Bonded SOI wafers –
It creates the buried oxide without ion implantation.
First two silicon wafers undergo thermal oxidation process to form $SiO_2$ layer.
The two hydrophilic surfaces (such as $SiO_2$) are brought into intimate contact of each other to form the buried oxide.
The backside of one of the …