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Justify the statement that silicon based microelectronics is different than micro-fabrication (MEMS fabrication)

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

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Sr No VLSI MEMS
1 Contain micro scale devices Contain micro scale devices and tools
2 Electrical parameters only Electrical and mechanical parameter
3 Based on design rules Based on process variation
4 Highly developed technology It is still in developing stage
5 Details of fabrication not needed Details of …

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