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Justify the statement that silicon based microelectronics is different than micro-fabrication (MEMS fabrication)

written 6.1 years ago by teamques10 ★ 69k

•   modified 6.0 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

mems technology

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written 6.0 years ago by teamques10 ★ 69k

•   modified 6.0 years ago

Sr No	VLSI	MEMS
1	Contain micro scale devices	Contain micro scale devices and tools
2	Electrical parameters only	Electrical and mechanical parameter
3	Based on design rules	Based on process variation
4	Highly developed technology	It is still in developing stage
5	Details of fabrication not needed	Details of fabrication needed
6	Designed from standard library	Standard library is incomplete
7	Works on single energy domain i.e. electrical domain	Works on multiple energy domain such as electrical,mechanical,thermal,chemical etc
8	2-D layout required for CAD	3-D layout required for CAD
9	Easy to interconnect different parts	Difficult to interconnect different parts
10	HDL/VHDL software used for designing	No such software used
11	Transistor is the basic building blocks	Block doesn't have any transistor
12	No moving parts	May have moving parts
13	Packaging techniques are well developed	Packaging techniques are complex

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