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Define Piezo-resistive property of single crystal silicon as MEMS material. Also define and justify that semiconductor material has high Gauge factor.
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  • It is a property of a material where the bulk resistivity is charged by mechanical stresses applied to the material. If you apply mechanical stress or force on a bulk material, then its property particularly resistivity will change. That is the piezoresistivity.

  • Piezoresistivity which is very important and which is …

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