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Explain the process integration for typical MEMS Device.
written 5.6 years ago by gravatar for teamques10 teamques10 ★ 67k •   modified 5.5 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology
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written 5.5 years ago by gravatar for teamques10 teamques10 ★ 67k

MEMS process integration – the technique by which processing steps are combined into an ordered sequence with the goal of creating a methodology that allows the production of functional MEMS devices. Following is the process flow diagram.

Some of the blocks of the process integration are as follows –

Wafer …

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