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How MEMS pressure sensor converts pressure into its equivalent electrical parameter, explain with its schematics representation and fabrication process steps.
written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k •   modified 6.7 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology
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written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k modified 6.6 years ago by gravatar for yashbeer yashbeer ★ 11k

  • Principle of operation: A pressure sensor has a semiconductor distortion gauge formed on the surface of the diaphragm and it converts changes in electrical resistance into an electrical signal by means of the piezo resistance effect that occurs when the diaphragm is distorted due to an external force (pressure)

  • Schematic …

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