beam for the following given dimensions and a point contact load applied at its tip. E=170GPa, h(thickness)= 10$\mu m$, w(width)=2$\mu m$ & L(Length)= 50$\mu m$

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

K = Bending stiffness

F = Force

d = deflection

$k = \frac{ E \times w \times t^3}{4 \times L^3}$

where,

E = young's modulus = 170 Gpa = $170000 N/mm^2$

t = thickness t = 10 $\mu \ m$

w = width w = 2 $\mu \ m$

L …