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What is the stiffness constant of microcantilever

beam for the following given dimensions and a point contact load applied at its tip. E=170GPa, h(thickness)= 10$\mu m$, w(width)=2$\mu m$ & L(Length)= 50$\mu m$

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

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K = Bending stiffness

F = Force

d = deflection

$k = \frac{ E \times w \times t^3}{4 \times L^3}$

where,

E = young's modulus = 170 Gpa = $170000 N/mm^2$

t = thickness t = 10 $\mu \ m$

w = width w = 2 $\mu \ m$

L = Length L = $50\mu m$

$\therefore K = \frac{170 Gp \times 2 \times (10)^3}{4 \times (50^3)}$

$\therefore K = \frac{0.17 N/ \mu m^2 \times 2 \times 10^3}{4 \times 50^3}$

$\therefore K = \frac{340}{500000} = 6.8 \times 10^{-4}$

$\therefore K = 6.8 \times 10^{-4} N/\mu \ m$

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