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Justify the need of PECD with its proper schematic and explanation
written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k •   modified 6.7 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology
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written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k •   modified 6.7 years ago

  • In MEMS applications, more than one dissimilar materials are required to be deposited such as metals, dielectrics and polymer’s. These materials are required to be deposited for different reans.

  • Metals : Electrical contacts, bonding of wafers and other application oriented requirements.

  • Dielectrics : It plays important role in IC fabrication, …

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