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Explain fabrication of any one of the MEMS devices using Bulk micromaching technique.
written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k •   modified 6.7 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology
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written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k
  • Micromachining is defined as the process of shaping Si or other material to realize 3 dimensional mechanical structure in miniature form.
  • The oldest micromachining technology is bulk micromachining.
  • This technique involves the selective removal of the substrate material in order to realize miniaturized mechanical components.
  • Bulk micromachining can be accomplished …

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