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Name any two polymer materials for MEMS device fabrication. Also explain the importance of these polymer materials for MEMS device fabrication with suitable examples.
written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k •   modified 6.7 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology
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written 6.7 years ago by gravatar for teamques10 teamques10 ★ 70k •   modified 6.6 years ago

Selection of materials

• Material Selection is an important task as large no. of materials are available for various application.

• Performance of material depends on

i. Stability

ii. Young’s modulus

iii. Melting point

iv. Thermal expansion coefficient

v. Mechanical Hysteresis

Silicon

Ideal substrate material used in MEMS because of …

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