Write a short note on Si as a MEMS material

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written 6.7 years ago by

teamques10 ★ 70k

• modified 6.7 years ago

Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology

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written 6.7 years ago by

teamques10 ★ 70k

Silicon

Ideal substrate material used in MEMS because of the following reasons:

i. It is mechanically stable & easy to integrate with mechanical parts

ii. It has same thermal expansion coefficient as that of steel (215 GPa) , but it is as light as Al with d = 2.3 g/cm3 …

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