List three silicon compound materials used in MEMS and explain their roles in microsystems.

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written 5.1 years ago by

teamques10 ★ 64k

modified 5.1 years ago by

ankitpandey • 100

Three principal silicon compounds used in MEMS and microsystems.

1.Silicon dioxide [$sio_2$]

2.Silicon carbide [siC]

3.Silicon nitride [$si_3 N_4$]

1. Silicon dioxide [si$o_2$] :

It is least expensive material to offer good thermal and electrical insulation.
It is used as low cost material for "masks" in micro fabrication processes such as etching, deposition and diffusion.
Used as sacrificial material in "surface micro-machining".

2. Silicon Carbide [siC] :

Its very high melting point and resistance to chemical reactions make it ideal candidate material for being masks in micro fabrication processes.

3. Silicon nitride [s$i_3$$N_4$]

Used as excellent barrier to diffusion to water and ions.
Its ultra strong resistance to oxidation and many etchants make it a superior material for masks in deep etching.
It is used as high strength electric insulators.

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