Discuss selection of material based on application and explain "silicon use as ideal substrate material in MEMS".

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written 6.7 years ago by

teamques10 ★ 70k

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Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology

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written 6.7 years ago by

teamques10 ★ 70k

modified 6.7 years ago by

ankitpandey • 100

Material selection is essential for efficient design of MEMS
For MEMS designers, one of the key jobs for achieving the high level of reliability, low unit cost and optimal function performance of micro electromechanical devices is to carefully choose materials from a limited set.
Silicon based materials, which have been …

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