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State various deposition techniques. Explain in brief the technique of PVD for MEMS device Fabrication. Also define step coverage and shadowing.
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written 6.7 years ago by
teamques10
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• modified 6.6 years ago |
- physical deposition techniques :
Thermal evaporation
E - beam evaporation
Sputtering
- Chemical deposition techniques :
Electrochemical deposition
Electroless plating
- Physical vapor deposition (pvd) :
- Chemical vapor deposition (cvd) :
APCVD
LPCVD
PECVD
Physical vapor deposition :
Thin metallic films are needed for fulfilling some requirements of …
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