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What is MEMS? Give two examples of MEMS devices which are characterized by sensors and actuators.
1 Answer
| written 6.7 years ago by | • modified 6.7 years ago |
MEMS is any system that performs electrical and mechanical functions with components in micrometers is a MEMS.
Micro-electro-mechanical systems [MEMS] is the integration of mechanical elements, sensors, actuators and electronics on a common substrate, through the utilization of microfabrication technology.
MEMS devices:
1) Air bag:
Depending on crash, severity the …