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Write short note on Selection of MEMS material based on applications
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written 3.5 years ago by
sagarkolekar
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- In recent years, enormous progress and commercialization of Microsystems.
- Associated with these advances is an expansion of the set of materials available to MEMS designers.
- In addition to the materials traditionally used in silicon microelectronics, it is now possible to introduce and integrate a wide variety of metals and alloys, …
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