- In recent years, enormous progress and commercialization of Microsystems.
- Associated with these advances is an expansion of the set of materials available to MEMS designers.
- In addition to the materials traditionally used in silicon microelectronics, it is now possible to introduce and integrate a wide variety of metals and alloys, ceramics and glasses and polymers and elastomers.
- This capability motivates the following question, given a design concept, how is a designer to choose a material or set of materials to optimize performance and reliability.
- There are 3 requirements for materials to be used in MEMS.
1) Compatibility with silicon technology.
2) Desirable electromechanical properties.
3) Low values of residual stresses.
Materials should be selected for applications based on measurable criteria.
It is possible to compare the suitability of materials for a given application according to quantifiable performance metrics based on material properties such as young's modulus, density, strength, etc.
Some material properties such as scale, role of manufacturing, microstructures fiber composite allow flexibility are more invariant than others.