Write short note on Selection of MEMS material based on applications

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written 6.7 years ago by

teamques10 ★ 70k

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Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

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mems technology

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written 6.7 years ago by

teamques10 ★ 70k

• modified 6.7 years ago

In recent years, enormous progress and commercialization of Micro-systems.
Associated with these advances is an expansion of the set of materials available to MEMS designers.
In addition to the materials traditionally used in silicon microelectronics, it is now possible to introduce and integrate a wide variety of metals and alloys, …

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