Mumbai University > Electronics Engineering > Sem 8 > MEMS Technology

Marks: 5M

Following are the MEMS device characteristics which we have to consider while designing MEMS devices.

1) Piezoresistance

2) TCR

3) Stiffness

4) Adhesion

5) Vibration

6) Resonant frequency

1) Piezoresistance [PZR] : It is the change in the electrical resistivity of a solid induced by an applied mechanical stress. Its …